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| Paper: |
Advanced Fabrication Methods for Next-Generation UV Gratings: Enabling Habitable Worlds Observatory Spectroscopy Through Precision Nanofabrication |
| Monograph: |
11, HWO25 Proceedings Part II: Mission Framework, Technology, and Broader Contributions |
| Page: |
305 |
| Authors: |
Fabien Grisé, Randall L. McEntaffer, Jake McCoy, Drew M. Miles, Mackenzie Carlson, Casey DeRoo, Brian Fleming, Kevin France, Nicholas Kruczek, Stephan McCandliss, and Keri Hoadley |
| DOI: |
10.26624/OOYV4922 |
| Abstract: |
The Habitable Worlds Observatory (HWO) demands unprecedented ultraviolet spectroscopic performance that requires significant advances in diffraction grating fabrication technology. We summarize electron-beam lithography (EBL) -based fabrication methods that address critical manufacturing challenges for current and next-generation UV gratings. Our latest advances include: (1) the ability to pattern and etch variable line space grating patterns with feature sizes down to 50 nm, (2) the fabrication of ultra-low blaze angle (< 2 deg) gratings and (3) EBL patterning of gratings onto challenging curved substrates. Development of these fabrication processes aim at maximizing diffraction efficiency while enabling high spectral resolution with excellent scatter control, directly enabling the grating technologies identified in NASA's Astrophysics Strategic Technology Gaps. Through ongoing validation on multiple NASA missions, these manufacturing methods establish the fabrication foundation essential for HWO's transformative science objectives. |
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